Innovation
Patent tech for in-situ physical property analysis of nanomaterials upon engineering.
Accuracy
Multifunctional vacuum system avoids physical transfer of sample and contamination.
AI Support
AI algorithm suggests analysis window and paramter based on frontier research and
simulation
Key Capabilities
- Surface dopants/thin film deposition of organic species, metal oxides, noble metals and alkali metals, by using standard effusion cell (80 °C to 1000 °C), standard temperature effusion cell (300 °C to 1500 °C) or alkali metal dispenser configured effusion cells (specific for alkali metals).
- Deposition rate precisely controlled and further calibration by quartz crystal microbalance (QCM).
- Compact vacuum chamber enables efficient system pumping down and cooling for quick analysis.
- Base pressure: 4E-8 mbar
- Upon nitrogen ventilation, 1 h pumping, pressure: 8E-7 mbar; 12 h pumping, pressure: 8E-8 mbar
Electrical measurement of nanoscale devices located in high vacuum chamber is realized via 16 pins BNC connectors soldering with sample stage and further controlled by a source meter through cables. Disruptions from outside atmosphere are efficiently minimized with DC current noise level at 0.1 pA.
Various gas molecules can be introduced into the vacuum chamber via inlet valve to evaluate device stability or develop sensors. The amount of gas molecules dosed is controlled by monitoring the chamber pressure and the duration of gas leaking. Gas tubes are specially designed to connect with mechanical pump and turbo pump.
The sample stage is specially designed for temperature varied electrical measurement on sample. Temperature range from:
- 77-400 K with liquid nitrogen
- 10-400 K with liquid helium
Samples are loaded into the 16 wires LLC chip carrier socket inside the vacuum chamber through the front entry door.
Linear motion of sample stage in the system enables the device to close enough to viewpoint for optical and opto-electrical analysis. Compatible to various light sources:
- Xenon light source (wide output spectrum from 300 nm to 1000 nm).
- Laser light source (405 nm, 473 nm, 515 nm and 638 nm). Laser light source is integrated with microscope-based fine focus setup to facilitate a fast focusing with a focused laser spot size of less than 4um in diameter.
Application Scenrios
In-situ Surface Doping
Gas Sensor Development
/
Stability Test/Atmosphere Simulation
Composite Material Fabrication
Specifications
